Organic thin films were sputter-deposited onto glass substrates in an N-2/CF4 mixture discharge gas using a polyimide (Kapton) target. FTIR observation showed that the thin films contained imide bases. The compositions of the films determined by XPS depended on CF4 concentration in the gas and F included films were obtained. The surface energy of the thin films measured by the contact angle method ranged between 17 and 64 mJ/m(2). The dielectric constant of the thin films at 1 MHz was measured and the lowest dielectric constant epsilon was approximately 2.0. (C) 2003 Elsevier Science B.V. All rights reserved.