검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Adsorption of Chlorine on TiSi2 - Application to Etching and Deposition of Silicide Films Ditchfield R, Mendicino MA, Seebauer EG Journal of the Electrochemical Society, 143(1), 266, 1996 |
| 2 |
Optimization of Selective TiSi2 Chemical-Vapor-Deposition by Mechanistic Chemical-Kinetics Southwell RP, Mendicino MA, Seebauer EG Journal of Vacuum Science & Technology A, 14(3), 928, 1996 |
| 3 |
Kinetics of Salicide Contact Formation for Thin-Film SOI Transistors Mendicino MA, Seebauer EG Journal of the Electrochemical Society, 142(2), L28, 1995 |
| 4 |
Silicon-on-Insulator Material Qualification for Low-Power Complementary Metal-Oxide-Semiconductor Application Mendicino MA, Vasudev PK, Maillot P, Hoener C, Baylis J, Bennett J, Boden T, Jackett S, Huffman K, Godwin M Thin Solid Films, 270(1-2), 578, 1995 |
| 5 |
Chemical-Vapor-Deposition of TiSi2 Using SiH4 and TiCl4 Mendicino MA, Southwell RP, Seebauer EG Thin Solid Films, 253(1-2), 473, 1994 |