검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Reactive Ion Etching Induced Damage with Gas-Mixtures Chf3 O2 and SF6 O2 Wu W, Mclarty PK Journal of Vacuum Science & Technology A, 13(1), 67, 1995 |
| No. | Article |
|---|---|
| 1 |
Reactive Ion Etching Induced Damage with Gas-Mixtures Chf3 O2 and SF6 O2 Wu W, Mclarty PK Journal of Vacuum Science & Technology A, 13(1), 67, 1995 |