검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Properties of atomic-layer-deposited ultra-thin AIN films on GaAs surfaces Mattila P, Bosund M, Jussila H, Aierken A, Riikonen J, Huhtio T, Lipsanen H, Sopanen M Applied Surface Science, 314, 570, 2014 |
| 2 |
GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride (vol 256, pg 7434, 2010) Bosund M, Mattila P, Aierken A, Hakkarainen T, Koskenvaara H, Sopanen M, Airaksinen VM, Lipsanen H Applied Surface Science, 257(6), 2412, 2011 |
| 3 |
GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride Bosund M, Mattila P, Aierken A, Hakkarainen T, Koskenvaara H, Sopanen M, Airaksinen VM, Lipsanen H Applied Surface Science, 256(24), 7434, 2010 |