Previous Article Next Article Table of Contents Applied Surface Science, Vol.257, No.6, 2412-2412, 2011 DOI10.1016/j.apsusc.2010.09.033 Export Citation GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride (vol 256, pg 7434, 2010) Bosund M, Mattila P, Aierken A, Hakkarainen T, Koskenvaara H, Sopanen M, Airaksinen VM, Lipsanen H Please enable JavaScript to view the comments powered by Disqus.
