검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effects of smoothing on defect printability at extreme ultraviolet wavelengths Cardinale GF, Ray-Chaudhuri AK, Fisher A, Mangat PSJ, Wasson J, Mirkarimi PB, Gullikson E Journal of Vacuum Science & Technology B, 18(6), 2944, 2000 |