검색결과 : 12건
| No. | Article |
|---|---|
| 1 |
Comparison of Ohmic Metallization Schemes for Ingaaln Ren F, Vartuli CB, Pearton SJ, Abernathy CR, Donovan SM, Mackenzie JD, Shul RJ, Zolper JC, Lovejoy ML, Baca AG, Hagerottcrawford M, Jones KA Journal of Vacuum Science & Technology A, 15(3), 802, 1997 |
| 2 |
High-Rate Reactive Ion Etch and Electron-Cyclotron-Resonance Etching of GaAs via Holes Using Thick Polyimide and Photoresist Masks Shul RJ, Lovejoy ML, Word JC, Howard AJ, Rieger DJ, Kravitz SH Journal of Vacuum Science & Technology B, 15(3), 657, 1997 |
| 3 |
Thermal-Stability of W, WSix, and Ti/Al Ohmic Contacts to Ingan, Inn, and Inaln Vartuli CB, Pearton SJ, Abernathy CR, Mackenzie JD, Shul RJ, Zolper JC, Lovejoy ML, Baca AG, Hagerottcrawford M Journal of Vacuum Science & Technology B, 14(6), 3520, 1996 |
| 4 |
Multilevel Interconnects for Heterojunction Bipolar-Transistor Integrated-Circuit Technologies Patrizi GA, Lovejoy ML, Enquist PM, Schneider RP, Hou HQ Thin Solid Films, 290-291, 435, 1996 |
| 5 |
Thin-Film Tantalum Nitride Resistor Technology for Phosphide-Based Optoelectronics Lovejoy ML, Patrizi GA, Rieger DJ, Barbour JC Thin Solid Films, 290-291, 513, 1996 |
| 6 |
Low-Resistivity Ohmic Contacts to Moderately Doped N-GaAs with Low-Temperature Processing Lovejoy ML, Howard AJ, Zavadil KR, Rieger DJ, Shul RJ, Barnes PA Journal of Vacuum Science & Technology A, 13(3), 758, 1995 |
| 7 |
Plasma-Induced Damage of GaAs During Etching of Refractory-Metal Contacts Shul RJ, Lovejoy ML, Baca AG, Zolper JC, Rieger DJ, Hafich MJ, Corless RF, Vartuli CB Journal of Vacuum Science & Technology A, 13(3), 912, 1995 |
| 8 |
Plasma-Induced Damage of GaAs PN-Junction Diodes Using Electron-Cyclotron-Resonance Generated Cl-2/Ar, BCl3/Ar, Cl-2/BCl3/Ar, and Sicl4/Ar Plasmas Shul RJ, Lovejoy ML, Hetherington DL, Rieger DJ, Klem JF, Melloch MR Journal of Vacuum Science & Technology B, 13(1), 27, 1995 |
| 9 |
AlGaAsSb/Ingasb Quantum-Well Heterostructures for P-Channel Field-Effect Transistors Klem JF, Lovejoy ML Journal of Vacuum Science & Technology B, 13(2), 702, 1995 |
| 10 |
New Methods for Circuit Fabrication on Poly(Tetrafluoroethylene) Substrates Howard AJ, Rye RR, Ricco AJ, Rieger DJ, Lovejoy ML, Sloan LR, Mitchell MA Journal of the Electrochemical Society, 141(12), 3556, 1994 |