화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Interfacial reaction and electrical characteristics of Cu(RuTaNx) on GaAs: Annealing effects
Leau WK, Chu JP, Lin CH
Applied Surface Science, 257(16), 7286, 2011
2 High-performance copper alloy films for barrierless metallization
Lin CH, Leau WK, Wu CH
Applied Surface Science, 257(2), 553, 2010
3 Cu(ReNx) for Advanced Barrierless Interconnects Stable Up To 730 degrees C
Chu JP, Lin CH, Sun PL, Leau WK
Journal of the Electrochemical Society, 156(7), H540, 2009