검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Synthesis of silicon carbide thin films by ion beam sputtering Valentini A, Convertino A, Alvisi M, Cingolani R, Ligonzo T, Lamendola R, Tapfer L Thin Solid Films, 335(1-2), 80, 1998 |
| 2 |
Plasma-Assisted Dry-Etching of Cobalt Silicide for Microelectronics Applications Fracassi F, Dagostino R, Lamendola R, Filippo A, Rapisarda C, Vasquez P Journal of the Electrochemical Society, 143(2), 701, 1996 |
| 3 |
Dry-Etching of Titanium Nitride Thin-Films in CF4-O-2 Plasmas Fracassi F, Dagostino R, Lamendola R, Mangieri I Journal of Vacuum Science & Technology A, 13(2), 335, 1995 |
| 4 |
Fluorinated Diamond-Like Carbon-Films Deposits from Radiofrequency Glow-Discharge in a Triode Reactor Dagostino R, Lamendola R, Favia P, Giquel A Journal of Vacuum Science & Technology A, 12(2), 308, 1994 |