검색결과 : 4건
No. | Article |
---|---|
1 |
A new feature scale modem, and experiments of the hydrogen plasma assisted chemical vapor deposition of copper Lakshmanan SK, Gill WN Chemical Engineering Communications, 182, 99, 2000 |
2 |
A novel model of hydrogen plasma assisted chemical vapor deposition of copper Lakshmanan SK, Gill WN Thin Solid Films, 338(1-2), 24, 1999 |
3 |
Comparison of experiments with a lumped parameter model of the plasma assisted chemical vapor deposition of copper Lakshmanan SK, Gill WN Journal of the Electrochemical Society, 145(2), 694, 1998 |
4 |
Experiments on the plasma assisted chemical vapor deposition of copper Lakshmanan SK, Gill WN Journal of Vacuum Science & Technology A, 16(4), 2187, 1998 |