화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 A new feature scale modem, and experiments of the hydrogen plasma assisted chemical vapor deposition of copper
Lakshmanan SK, Gill WN
Chemical Engineering Communications, 182, 99, 2000
2 A novel model of hydrogen plasma assisted chemical vapor deposition of copper
Lakshmanan SK, Gill WN
Thin Solid Films, 338(1-2), 24, 1999
3 Comparison of experiments with a lumped parameter model of the plasma assisted chemical vapor deposition of copper
Lakshmanan SK, Gill WN
Journal of the Electrochemical Society, 145(2), 694, 1998
4 Experiments on the plasma assisted chemical vapor deposition of copper
Lakshmanan SK, Gill WN
Journal of Vacuum Science & Technology A, 16(4), 2187, 1998