검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Applications of vertical cavity surface emitting lasers for low-pressure chemical vapor deposition reactors Noh Y, Kim Y, Park S, Kim BBK, Kim HJ International Journal of Heat and Mass Transfer, 141, 245, 2019 |
| 2 |
Adsorption of TiCl4 on TiSi2 - Application to Silicide Chemical-Vapor-Deposition Southwell RP, Seebauer EG Journal of Vacuum Science & Technology A, 13(2), 221, 1995 |
| 3 |
Chemical-Vapor-Deposition of TiSi2 Using SiH4 and TiCl4 Mendicino MA, Southwell RP, Seebauer EG Thin Solid Films, 253(1-2), 473, 1994 |