화학공학소재연구정보센터
검색결과 : 6건
No. Article
1 Formation of SiC delta-doped-layer structures by CVD
Takahashi K, Uchida M, Kusumoto O, Yamashita K, Miyanaga R, Kitabatake M
Materials Science Forum, 457-460, 743, 2004
2 Surface morphology of SiC epitaxial layers grown by vertical hot-wall type CVD
Takahashi K, Uchida M, Yokogawa T, Kusumoto O, Yamashita K, Miyanaga R, Kitabatake M
Materials Science Forum, 389-3, 243, 2002
3 Delta-doped layers of SiC grown by'pulse doping' technique
Takahashi K, Yokogawa T, Uchida M, Kusumoto O, Yamashita K, Miyanaga R, Kitabatake M
Materials Science Forum, 389-3, 247, 2002
4 4H-SiC delta-doped accumulation-channel MOS FET
Yokogawa T, Takahashi K, Kusumoto O, Uchida M, Yamashita K, Kitabatake M
Materials Science Forum, 389-3, 1077, 2002
5 SiC vertical DACFET (Vertical delta-doped accumulation channel MOSFET)
Kusumoto O, Yokogawa T, Yamashita K, Takahashi K, Kitabatake M, Uchida M, Miyanaga R
Materials Science Forum, 389-3, 1211, 2002
6 SiC delta-doped-layer structures and DACFET
Takahashi K, Kusumoto O, Uchida M, Yamashita K, Kitabatake M
Materials Science Forum, 433-4, 629, 2002