화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Effect of patterning on thermal agglomeration of ultrathin silicon-on-insulator layer
Ishikawa Y, Kumezawa M, Nuryadi R, Tabe M
Applied Surface Science, 190(1-4), 11, 2002
2 Quantum confinement effects in Si quantum well and dot structures fabricated from ultrathin Silicon-on-insulator wafers
Tabe M, Kumezawa M, Ishikawa Y, Mizuno T
Applied Surface Science, 175, 613, 2001
3 Capacitance-voltage study of single-crystalline Si dots on ultrathin buried SiO2 formed by nanometer-scale local oxidation
Ishikawa Y, Kosugi M, Kumezawa M, Tsuchiya T, Tabe M
Thin Solid Films, 369(1-2), 69, 2000