화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Method of activation energy analysis and application to individual cells of 256Mb DRAM in 110 nm technology
Weber A, Birner A, Krautschneider W
Solid-State Electronics, 50(4), 613, 2006
2 Interface analysis of atomic layer deposited-TiN gate electrodes on ultrathin SiO2 layers
Sell B, Sanger A, Krautschneider W
Journal of Vacuum Science & Technology B, 21(3), 931, 2003
3 Impact of parasitic elements on the performance of digital CMOS circuits with Gigabit feature size
Schwantes S, Gottsche R, Krautschneider W
Solid-State Electronics, 47(7), 1243, 2003
4 Chemical vapor deposition of tungsten silicide (WSix) for high aspect ratio applications
Sell B, Sanger A, Schulze-Icking G, Pomplun K, Krautschneider W
Thin Solid Films, 443(1-2), 97, 2003