검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Simulations of a Feedback-Control Scheme for an Inductively-Coupled Plasma Source for Etching Applications Yamada N, Ventzek PL, Sakai Y, Tagashira H, Kitamori K Journal of the Electrochemical Society, 143(4), 1375, 1996 |
| 2 |
Simulations of Real-Time Control of 2-Dimensional Features in Inductively-Coupled Plasma Sources for Etching Applications Ventzek PL, Yamada N, Sakai Y, Tagashira H, Kitamori K Journal of Vacuum Science & Technology A, 13(5), 2456, 1995 |