화학공학소재연구정보센터
검색결과 : 13건
No. Article
1 Heat capacities, entropies, and Gibbs free energies of formation of low-k amorphous Si(O)CH dielectric films and implications for stability during processing
Chen JW, Calvin J, Asplund M, King SW, Woodfield BF, Navrotsky A
Journal of Chemical Thermodynamics, 128, 320, 2019
2 Synthesis and optimization of low-pressure chemical vapor deposition-silicon nitride coatings deposited from SiHCl3 and NH3
Cossou B, Jacques S, Couegnat G, King SW, Li L, Lanford WA, Bhattarai G, Paquette M, Chollon G
Thin Solid Films, 681, 47, 2019
3 Thermodynamics of amorphous SiN(O)H dielectric films synthesized by plasma-enhanced chemical vapor deposition
Chen JW, Niu M, Calvin J, Asplund M, King SW, Woodfield BF, Navrotsky A
Journal of the American Ceramic Society, 101(5), 2017, 2018
4 Thermodynamic Stability of Low-k Amorphous SiOCH Dielectric Films
Chen JW, King SW, Muthuswamy E, Koryttseva A, Wu D, Navrotsky A
Journal of the American Ceramic Society, 99(8), 2752, 2016
5 Tuning the properties of a complex disordered material: Full factorial investigation of PECVD-grown amorphous hydrogenated boron carbide
Nordell BJ, Keck CL, Nguyen TD, Caruso AN, Purohit SS, Lanford WA, Dutta D, Gidley D, Henry P, King SW, Paquette MM
Materials Chemistry and Physics, 173, 268, 2016
6 Valence band offset and Schottky barrier at amorphous boron and boron carbide interfaces with silicon and copper
King SW, French M, Xu GH, French B, Jaehnig M, Bielefeld J, Brockman J, Kuhn M
Applied Surface Science, 285, 545, 2013
7 Tailored amorphous silicon carbide barrier dielectrics by nitrogen and oxygen doping
Matsuda Y, King SW, Dauskardt RH
Thin Solid Films, 531, 552, 2013
8 X-ray Photoelectron Spectroscopy Investigation of the Schottky Barrier at a-BN:H/Cu Interfaces
King SW, French M, Bielefeld J, Jaehnig M, Kuhn M, French B
Electrochemical and Solid State Letters, 14(12), H478, 2011
9 Thermal conductivity and sound velocity measurements of plasma enhanced chemical vapor deposited a-SiC:H thin films
Hondongwa DB, Olasov LR, Daly BC, King SW, Bielefeld J
Thin Solid Films, 519(22), 7895, 2011
10 Simple bond energy approach for non-destructive measurements of the fracture toughness of brittle materials
King SW, Antonelli GA
Thin Solid Films, 515(18), 7232, 2007