검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Conformal deposition of Ti-C : H coatings over high-aspect-ratio micro-scale structures and tribological characteristics Cao DM, Meng W, Simko SJ, Doll GL, Wang I, Kelly KW Thin Solid Films, 429(1-2), 46, 2003 |
| 2 |
Amorphous hydrocarbon based thin films for high-aspect-ratio MEMS applications Cao DM, Wang T, Feng B, Meng WJ, Kelly KW Thin Solid Films, 398-399, 553, 2001 |