Results on conformal deposition of Ti-containing hydrocarbon (Ti-C:H) coatings over Ni high-aspect-ratio micro-scale structures (HARMs) fabricated by the lithography, electroplating and molding (LIGA) technique are reported. Using a high-density plasma assisted hybrid chemical vapor deposition/physical vapor deposition technique, it is demonstrated that conformal Ti-C:H deposition can be achieved over RARMs with similar to 1000 mum in height and similar to 220 mum in mutual spacing. Surface roughness and tribological characteristics of Ti-C:H coatings during unlubricated sliding contact with 52100 steel balls are studied with atomic force microscopy, micro-Raman scattering, and optical microscopy on macro-scale samples. It is shown that unlubricated sliding between Ti-C:H and 52100 steel is significantly influenced by the composition of the Ti-C:H coating. (C) 2003 Elsevier Science B.V. All rights reserved.