검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Magnetic field optimization in a dielectric magnetically enhanced reactive ion etch reactor to produce an instantaneously uniform plasma Lindley RA, Bjorkman CH, Shan H, Ke KH, Doan K, Mett RR, Welch M Journal of Vacuum Science & Technology A, 16(3), 1600, 1998 |
| 2 |
Process Kit and Wafer Temperature Effects on Dielectric Etch Rate and Uniformity of Electrostatic Chuck Shan HC, Pu BY, Gao H, Ke KH, Lewis J, Welch M, Deshpandey C Journal of Vacuum Science & Technology B, 14(1), 521, 1996 |
| 3 |
Mxp+ - A New Dielectric Etcher with Enabling Technology, High Productivity, and Low Cost-of-Consumables Shan HC, Lee E, Welch M, Pu B, Carducci J, Ke KH, Gao H, Luscher P, Crean G, Wang R, Blume R, Cooper J, Wu R Journal of Vacuum Science & Technology B, 14(2), 716, 1996 |