검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Co-operation process of plasma CVD and sputtering, using methane, SF6 and Ar mixture gas, and gold plate discharge electrode Matsushita M, Kashem A, Morita S Thin Solid Films, 407(1-2), 50, 2002 |
| No. | Article |
|---|---|
| 1 |
Co-operation process of plasma CVD and sputtering, using methane, SF6 and Ar mixture gas, and gold plate discharge electrode Matsushita M, Kashem A, Morita S Thin Solid Films, 407(1-2), 50, 2002 |