검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Fundamental issues in wafer bonding Gosele U, Bluhm Y, Kastner G, Kopperschmidt P, Krauter G, Scholz R, Schumacher A, Senz S, Tong QY, Huang LJ, Chao YL, Lee TH Journal of Vacuum Science & Technology A, 17(4), 1145, 1999 |
| 2 |
Phase identification of micro and macro bubbles at the interface of directly bonded GaAs on sapphire Senz S, Kopperschmidt P, Kastner G, Hesse D Journal of Materials Science, 33(8), 2073, 1998 |
| 3 |
Surface quality and laser-damage behaviour of chemo-mechanically polished CaF2 single crystals characterized by scanning electron microscopy Johansen H, Kastner G Journal of Materials Science, 33(15), 3839, 1998 |
| 4 |
SILICON-WAFER BONDING VIA DESIGNED MONOLAYERS STEINKIRCHNER J, MARTINI T, REICHE M, KASTNER G, GOSELE U Advanced Materials, 7(7), 662, 1995 |