검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Top surface imaging process at and below quarter-micron resolution and pattern transfer into metal Irmscher M, Hofflinger B, Reuter C, Springer R, Stauffer C, Puttock M Journal of Vacuum Science & Technology B, 15(6), 2605, 1997 |
| 2 |
Comparative-Evaluation of Chemically Amplified Resists for Electron-Beam Top Surface Imaging Use Irmscher M, Hofflinger B, Springer R Journal of Vacuum Science & Technology B, 12(6), 3925, 1994 |