Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.12, No.6, 3925-3929, 1994 DOI10.1116/1.587576 Export Citation Comparative-Evaluation of Chemically Amplified Resists for Electron-Beam Top Surface Imaging Use Irmscher M, Hofflinger B, Springer R Keywords:LITHOGRAPHY Please enable JavaScript to view the comments powered by Disqus.
