검색결과 : 14건
| No. | Article |
|---|---|
| 1 |
Synergistic Ag (111) and Cu (111) texture evolution in phase-segregated Cu1-xAgx magnetron sputtered composite thin films Filoti DI, Bedell AR, Harper JME Journal of Vacuum Science & Technology A, 28(4), 838, 2010 |
| 2 |
Crystallographic texture control of sputtered HfN thin films using low oxygen partial pressures Deniz D, Harper JME Journal of Vacuum Science & Technology A, 27(1), 63, 2009 |
| 3 |
Dependence of fiber texture on composition in metal-insulator Au-SiO2 composite thin films Filoti DI, Brown AM, Carlson D, Harper JME Journal of Vacuum Science & Technology B, 27(2), 585, 2009 |
| 4 |
Tilted fiber texture in aluminum nitride thin films Deniz D, Harper JME, Hoehn JW, Chen F Journal of Vacuum Science & Technology A, 25(4), 1214, 2007 |
| 5 |
On the use of alloying elements for Cu interconnect applications Barmak K, Cabral C, Rodbell KP, Harper JME Journal of Vacuum Science & Technology B, 24(6), 2485, 2006 |
| 6 |
Effect of deposition angle on fiber axis tilt in sputtered aluminum nitride and pure metal films Dellas NS, Harper JME Thin Solid Films, 515(4), 1647, 2006 |
| 7 |
Evaluation of thermal stability for CMOS gate metal materials Cabral C, Lavoie C, Ozcan AS, Amos RS, Narayanan V, Gusev EP, Jordan-Sweet JL, Harper JME Journal of the Electrochemical Society, 151(12), F283, 2004 |
| 8 |
Ion doses for low-energy ion-assist applications Kaufman HR, Harper JME Journal of Vacuum Science & Technology A, 22(1), 221, 2004 |
| 9 |
Evolution of microstructure in Ti-Ta bilayer thin films on polycrystalline-Si and Si(001) Ozcan AS, Ludwig KF, Lavoie C, Basu SN, Coia C, Cabral C, Rodbell KP, Harper JME Thin Solid Films, 466(1-2), 238, 2004 |
| 10 |
Texture and resistivity of dilute binary Cu(Al), Cu(In), Cu(Ti), Cu(Nb), Cu(Ir), and Cu(W) alloy thin films Gungor A, Barmak K, Rollett AD, Cabral C, Harper JME Journal of Vacuum Science & Technology B, 20(6), 2314, 2002 |