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Journal of Vacuum Science & Technology A, Vol.22, No.1, 221-224, 2004
Ion doses for low-energy ion-assist applications
We present simple, convenient procedures for calculating ion doses for ion-assist applications such as cleaning and property modification. For many of these applications, gridless ion sources of the end-Hall type are particularly well-suited to the generation of high ion-beam currents at ion energies low enough to minimize damage. (C) 2004 American Vacuum Society.