화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Ultrathin Nitride Layers Grown by Molecular-Beam Epitaxy and Their Effects on Interface States in Silicon Metal-Insulator-Semiconductor Field-Effect Transistors
Fayfield RT, Chen J, Hagedorn MS, Higman TK, Moy AM, Cheng KY
Journal of Vacuum Science & Technology B, 13(2), 786, 1995
2 Low-Pressure Plasma Deposition of Photosensitive Organosilicon Polymers
Hagedorn MS, Higman TK, Fayfield RT, Chen J
Journal of Vacuum Science & Technology B, 13(3), 862, 1995