검색결과 : 2건
No. | Article |
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1 |
Ultrathin Nitride Layers Grown by Molecular-Beam Epitaxy and Their Effects on Interface States in Silicon Metal-Insulator-Semiconductor Field-Effect Transistors Fayfield RT, Chen J, Hagedorn MS, Higman TK, Moy AM, Cheng KY Journal of Vacuum Science & Technology B, 13(2), 786, 1995 |
2 |
Low-Pressure Plasma Deposition of Photosensitive Organosilicon Polymers Hagedorn MS, Higman TK, Fayfield RT, Chen J Journal of Vacuum Science & Technology B, 13(3), 862, 1995 |