Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology B, Vol.13, No.3, 862-864, 1995 DOI10.1116/1.588197 Export Citation Low-Pressure Plasma Deposition of Photosensitive Organosilicon Polymers Hagedorn MS, Higman TK, Fayfield RT, Chen J Keywords:POLYMERIZATION Please enable JavaScript to view the comments powered by Disqus.
