검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Infrared spectroscopic ellipsometry applied to the characterization of nano-structures of silicon IC manufacturing Boher P, Bucchia M, Guillotin C, Defranoux C Thin Solid Films, 450(1), 173, 2004 |
| No. | Article |
|---|---|
| 1 |
Infrared spectroscopic ellipsometry applied to the characterization of nano-structures of silicon IC manufacturing Boher P, Bucchia M, Guillotin C, Defranoux C Thin Solid Films, 450(1), 173, 2004 |