검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Application of TXRF for ion implanter dose matching experiments Frost MR, French M, Harris W Applied Surface Science, 231-2, 734, 2004 |
| 2 |
Surface Metal Contamination During Ion-Implantation - Comparison of Measurements by Secondary-Ion Mass-Spectroscopy, Total-Reflection X-Ray-Fluorescence Spectrometry, and Vapor-Phase Decomposition Used in Conjunction with Graphite-Furnace Atomic-Absorption Spectrometry and Inductively-Coupled Plasma-Mass Spectrometry Frost MR, Harrington WL, Downey DF, Walther SR Journal of Vacuum Science & Technology B, 14(1), 329, 1996 |
| 3 |
Ultra-Shallow Box-Like Profiles Fabricated by Pulsed Ultraviolet-Laser Doping Process Ishida E, Sigmon TW, Weiner KH, Frost MR Journal of Vacuum Science & Technology B, 12(1), 399, 1994 |