검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Resistivity of sub-50 nm copper lines epitaxially grown on Si(100) substrate Wang PI, Frey MD, Washington M, Nayak S, Lu TM Thin Solid Films, 520(19), 6106, 2012 |
| No. | Article |
|---|---|
| 1 |
Resistivity of sub-50 nm copper lines epitaxially grown on Si(100) substrate Wang PI, Frey MD, Washington M, Nayak S, Lu TM Thin Solid Films, 520(19), 6106, 2012 |