검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Mxp+ - A New Dielectric Etcher with Enabling Technology, High Productivity, and Low Cost-of-Consumables Shan HC, Lee E, Welch M, Pu B, Carducci J, Ke KH, Gao H, Luscher P, Crean G, Wang R, Blume R, Cooper J, Wu R Journal of Vacuum Science & Technology B, 14(2), 716, 1996 |