화학공학소재연구정보센터
검색결과 : 16건
No. Article
1 Boron-doping induced Sn loss in GeSn alloys grown by chemical vapor deposition
Tsai CE, Lu FL, Chen PS, Liu CW
Thin Solid Films, 660, 263, 2018
2 Glide of threading edge dislocations after basal plane dislocation conversion during 4H-SiC epitaxial growth
Abadier M, Song HZ, Sudarshan TS, Picard YN, Skowronski M
Journal of Crystal Growth, 418, 7, 2015
3 Chemical vapor deposition processes for the fabrication of epitaxial Si-O superlattices
Jayachandran S, Delabie A, Maggen J, Caymax M, Loo R, Meersschaut J, Lenka H, Vandervorst W, Heyns M
Thin Solid Films, 557, 36, 2014
4 Basal plane dislocation conversion near the epilayer/substrate interface in epitaxial growth of 4 degrees off-axis 4H-SiC
Song HZ, Sudarshan TS
Journal of Crystal Growth, 371, 94, 2013
5 Phosphorus atomic layer doping in Ge using RPCVD
Yamamoto Y, Kurps R, Mai C, Costina I, Murota J, Tillack B
Solid-State Electronics, 83, 25, 2013
6 Faceting and nanostructure effects in Si and SiGe epitaxy
Dutartre D, Seiss B, Campidelli Y, Pellissier-Tanon D, Barge D, Pantel R
Thin Solid Films, 520(8), 3163, 2012
7 Multiscale simulation for epitaxial silicon carbide growth by chlorides route
Masi M, Fiorucci A, Camarda M, La Magna A, La Via F
Thin Solid Films, 518, S6, 2010
8 Epitaxial film growth of chromium dioxide by low pressure chemical vapor deposition using chromium carbonyl
Wang JW, Pathak M, Zhong X, LeClair P, Klein TM, Gupta A
Thin Solid Films, 518(23), 6853, 2010
9 Epitaxial growth of lithium niobate film using metalorganic chemical vapor deposition
Akiyama Y, Shitanaka K, Murakami H, Shin YS, Yoshida M, Imaishi N
Thin Solid Films, 515(12), 4975, 2007
10 Epitaxial SiC grown on silicon-on-insulator substrate with ultra-thin silicon-over-layer
Huang FY, Wang XF, Sun GS, Zhao WS, Zeng YP, Bian EL
Thin Solid Films, 484(1-2), 261, 2005