검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Focused ion beam induced deposition of low-resistivity copper material Gannon TJ, Gu G, Casey JD, Huynh C, Bassom N, Antoniou N Journal of Vacuum Science & Technology B, 22(6), 3000, 2004 |
| 2 |
Copper device editing: Strategy for focused ion beam milling of copper Casey JD, Phaneuf M, Chandler C, Megorden M, Noll KE, Schuman R, Gannon TJ, Krechmer A, Monforte D, Antoniou N, Bassom N, Li J, Carleson P, Huynh C Journal of Vacuum Science & Technology B, 20(6), 2682, 2002 |
| 3 |
End point of silicon milling using an optical beam induced current signal for controlled access to integrated circuits for backside circuit editing Antoniou N, Bassom NJ, Huynh C, Monforte D, Casey JD, Krechmer A, Carleson P Journal of Vacuum Science & Technology B, 20(6), 2695, 2002 |