화학공학소재연구정보센터
검색결과 : 13건
No. Article
1 Viewing Angle and Imaging Polarization Analysis of Liquid Crystal Displays and Their Components
Leroux T, Boher P
Molecular Crystals and Liquid Crystals, 594(1), 122, 2014
2 Infrared spectroscopic ellipsometry applied to the characterization of nano-structures of silicon IC manufacturing
Boher P, Bucchia M, Guillotin C, Defranoux C
Thin Solid Films, 450(1), 173, 2004
3 Infrared spectroscopic ellipsometry applied to the characterization of ultra shallow junction on silicon and SOI
Defranoux C, Emeraud T, Bourtault S, Venturini J, Boher P, Hernandez M, Laviron C, Noguchi I
Thin Solid Films, 455-56, 150, 2004
4 Generalized ellipsometry for the characterization of anisotropic materials: influence of the sample adjustment on the extracted optical indices
Boher P, Piel JP, Sacepe B
Thin Solid Films, 455-56, 581, 2004
5 Automated metrology system including VUV spectroscopic ellipsometry and X-ray reflectometry for 300 mm silicon microelectronics
Boher P, Evrard P, Condat O, Dos Reis C, Defranoux C, Piel JP, Stehle JL, Bellandi E
Thin Solid Films, 455-56, 798, 2004
6 A new multiple wavelength ellipsometric imager: design, limitations and applications
Boher P, Thomas O, Piel JP, Stehle JL
Thin Solid Films, 455-56, 809, 2004
7 Influence of the nitrogen content on the field emission properties of a-CNx films prepared by pulsed laser deposition
Fogarassy E, Szorenyi T, Antoni F, Stoquert JP, Pirio G, Olivier J, Legagneux P, Boher P, Pons-Y-Moll O
Applied Surface Science, 197, 316, 2002
8 Carbon dependence of the dielectric response function in epitaxial SiGeC layers grown on Si
Bonan J, Meyer F, Finkman E, Warren P, Boher P
Thin Solid Films, 364(1-2), 53, 2000
9 Single shot excimer laser crystallization and LPCVD silicon TFTs
Helen Y, Mourgues K, Raoult F, Mohammed-Brahim T, Bonnaud O, Rogel R, Prochasson S, Boher P, Zahorski D
Thin Solid Films, 337(1-2), 133, 1999
10 Atomic scale characterization of semiconductors by in-situ real time spectroscopic ellipsometry
Boher P, Stehle JL
Thin Solid Films, 318(1-2), 120, 1998