화학공학소재연구정보센터
검색결과 : 8건
No. Article
1 A study of the electrical properties of graphene-incorporated direct-patternable ZnO thin films
Kim H, Baek JT, Park HH
Thin Solid Films, 529, 234, 2013
2 Investigation of surface polymerization on silicon exposed to C4F8 helicon wave plasmas
Lee WJ, Kim HS, Yeom GY, Baek JT
Thin Solid Films, 341(1-2), 184, 1999
3 Effect of temperature and substrate on the growth behaviors of chemical vapor deposited Al films with dimethylethylamine alane source
Jang TW, Moon W, Baek JT, Ahn BT
Thin Solid Films, 333(1-2), 137, 1998
4 Effects of Deposition Parameters on Composition, Structure, Resistivity and Step Coverage of Tin Thin-Films Deposited by Electron-Cyclotron-Resonance Plasma-Enhanced Chemical-Vapor-Deposition
Kim JS, Lee EJ, Baek JT, Lee WJ
Thin Solid Films, 305(1-2), 103, 1997
5 Modeling and Characterization of Gas-Phase Etching of Thermal Oxide and Teos Oxide Using Anhydrous HF and CH3OH
Lee CS, Baek JT, Yoo HJ, Woo SI
Journal of the Electrochemical Society, 143(3), 1099, 1996
6 Growth-Behavior of Copper Metalorganic Chemical-Vapor-Deposition Using the (Hfac)Cu(Vtmos) Precursor on Titanium Nitride Substrates
Jun CH, Kim YT, Baek JT, Yoo HJ, Kim DR
Journal of Vacuum Science & Technology A, 14(6), 3214, 1996
7 Tin Barrier Layer Formation by the 2-Step Rapid Thermal-Conversion Process
Kim YT, Jun CH, Lee JH, Baek JT, Joun H
Journal of Vacuum Science & Technology A, 14(6), 3245, 1996
8 Investigation of Link Formation in a Novel Planar-Type Antifuse Structure
Baek JT, Park HH, Kang SW, Ahn BT, Yoo IJ
Thin Solid Films, 288(1-2), 41, 1996