검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma doping technology for fabrication of nanoscale metal-oxide-semiconductor devices Cho WJ, Im K, Ahn CG, Yang JH, Oh J, Baek IBO, Lee S Journal of Vacuum Science & Technology B, 22(6), 3210, 2004 |
| No. | Article |
|---|---|
| 1 |
Plasma doping technology for fabrication of nanoscale metal-oxide-semiconductor devices Cho WJ, Im K, Ahn CG, Yang JH, Oh J, Baek IBO, Lee S Journal of Vacuum Science & Technology B, 22(6), 3210, 2004 |