검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
"Microfabrication of ultrahigh density wafer-level thin film compliant interconnects for through-silicon-via based chip stacks" (vol 24, pg 1780, 2006) Arunasalam P, Ackler HD, Sammakia BG Journal of Vacuum Science & Technology B, 25(1), 292, 2007 |
| 2 |
Microfabrication of ultrahigh density wafer-level thin film compliant interconnects for through-silicon-via based chip stacks Arunasalam P, Ackler HD, Sammakia BG Journal of Vacuum Science & Technology B, 24(4), 1780, 2006 |