| 초록 |
The ultrasonic nozzle is more eco-friendly than the normal pressure nozzle because of easy control of sprayed volume and less usage of solvent per unit area. In this study, the coating solution including dispersed SiO2 particles that is characteristic ofAnti-reflection(AR) was sprayed with a ultrasonic nozzle system.The coating solution was composed of SiO2, polyacrylate, UV initiator and a solvent. To compare with the coating properties, ultrasonic spray coating and bar coating were respectively carried out with same coating solution. The mixed solution composed ofMIBK, PGMEA, and TBA was applied to dilute the coating solution and the solid content of the solution was 4%. The film made by bar coating was characteristic of AR but the film made by spray coating did not show such property. It has been found that the film made by spray coating has ununiform surface thickness. Accordingly, it is considered that the solution is required to uniform the film thickness. |
