| 초록 |
The utilization of ZnO in gas sensor applications has a long history. Systems composed mainly of ZnO were studied as chemoresistive materials to detect gases like H2, NH3, CH4, O2, seafood smell (TMA or trimethylamine), ethanol, NO and CO. It has been suggested that thin film ZnO gas sensors exhibit higher sensitivities compared to other forms of ZnO sensors. A Cu-doped ZnO (CZO) film was prepared on a SiO2 substrate by Pulsed laser deposition (PLD) using 5% Cu-doped ZnO target. The CO-sensing properties of the CZO film were tested at operating temperatures of 200, 300, 350 and 400 °C. A Cu-doped ZnO (CZO) film was prepared on a SiO2 substrate by Pulsed laser deposition (PLD) using 5% Cu-doped ZnO target. The CO-sensing properties of the CZO film were tested at operating temperatures of 200, 300, 350 and 400 °C. |
