| 학회 | 한국재료학회 |
| 학술대회 | 2018년 봄 (05/16 ~ 05/18, 삼척 쏠비치 호텔&리조트) |
| 권호 | 24권 1호 |
| 발표분야 | E. 환경/센서 재료 분과 |
| 제목 | Structural properties and characterization of Zinc Oxide and Al-doped Zinc Oxide thin film and their applications as an analyzer for NO, NOx gases and UV light |
| 초록 | ZnO is a well-known Metal Oxide Semiconductor (MOS) material used in gas sensor applications due to its good electrical property, wide band gape of 3.37 eV, ~60 meV exciton binding energy, low cost, and high mechanical stability. Especially, ZnO nanorods structure is widely investigated in gas detection due to its high surface-to-volume ratio, nontoxicity, and suitable doping. Numerous methods have been applied to enhance the sensing performance of ZnO nanostructure gas sensors. In this research, thin film sensor structure was fabricated to improve the sensing response of ZnO and AZO to NO, NOx gases and UV light. Also, due to additional oxygen vacancies, Al doped ZnO (AZO) thin films were deposited on the surface of ZnO thin film be to further enhance the sensitivity of ZnO. Pure ZnO and AZO materials are prepared by the deposition method. They were annealed by furnace at the temperature range of 300-500°C under the inert system condition for 1h. The ZnO and Al doped materials nanostructures are characterized by Oscillography, field emission scanning electron microscopy (FE SEM), and UV visible. The maximum sensitivity was achieved by doping aluminum and it has much better sensing performance towards UV (254nm and 365 wavelength) and NO, NOx gases sensing. The response and recovery time for NO and NOx gases are ~2sec and ~3sec, and for UV light is ~1sec and ~2sec respectively. The mechanism for the improvement in the sensing properties can be explained with the surface adsorption theory. Keywords: Al-doped ZnO, gas sensor, UV and NO sensing sensor, Sensor sensing mechanism Acknowledgment This work was supported by the Research Funding by Kumoh National Institute of Technology. We would like to acknowledge and thank for the funding of WC 300 Project partially supported by Business for global cooperative R&D funded by Korea Small and Medium Business Administration in 2015. We would like to acknowledge and thank for the funding of Project – 10063553 partially supported by MOTIE in 2016. We would also like to acknowledge and thank for the funding by Project C0566194 and also like to acknowledge and thank for the funding by Project C0565004. |
| 저자 | Farkhod Azimov1, Sungjin Kim2, Amir Abidov1 |
| 소속 | 1School of Advanced Materials & Engineering, 2Kumoh National Institute of Technology |
| 키워드 | Al-doped ZnO; gas sensor; UV and NO sensing sensor; Sensor sensing mechanism |
