화학공학소재연구정보센터
학회 한국재료학회
학술대회 2018년 봄 (05/16 ~ 05/18, 삼척 쏠비치 호텔&리조트)
권호 24권 1호
발표분야 E. 환경/센서 재료 분과
제목 TiO2 coated ZnO nanorods growth using NCD process and their gas sensing properties
초록 In this study, we demonstrate the growth of TiO2 coated ZnO nanorods by chemical vapors deposition process (CVD) followed by nano-cluster deposition (NCD). The ZnO nanorods are coated uniformly by TiO2 vapors forming porous shell. The surface morphology and structural properties were investigated by using field emission scanning electron microscopy (FESEM), energy dispersive spectroscopy and X-ray diffraction (XRD). The grown TiO2 coated ZnO nanorods were used for the fabrication of gas sensor for the detection of H2 gas. The sensing results clearly show the effect of TiO2 thickness on the ZnO nanorods. The sensitivity of 43.3, 72.9, 79.9, 88.9, and 58.49% were obtained for 0, 10, 20, 20, 30 and 35 minutes respectively at 320℃ for 500ppm H2 concentration. The effect of thickness on the sensitivity was investigated.
    
KEYWORDS: Zinc Oxide, Titanium Oxide, Nano Cluster deposition, Chemical Vapor deposition, Gas sensor, Hydrogen.  

Acknowledgment
This work was supported by the Research Funding by Kumoh National Institute of Technology. We would like to acknowledge and thank for the funding of WC 300 Project partially supported by Business for global cooperative R&D funded by Korea Small and Medium Business Administration in 2015. We would like to acknowledge and thank for the funding of Project – 10063553 partially supported by MOTIE in 2016.
저자 Eadi Sunil Babu1, Sungjin Kim2, Ngo Hoang Ngoc1, Sengeragchaa Bolortuya2, Azimov Farkhod1, Hee Jun Kim2, Young Hwa Woo1
소속 1School of Advanced Materials & Engineering, 2Kumoh National Institute of Technology
키워드 Zinc Oxide; Titanium Oxide; Nano Cluster deposition; Chemical Vapor deposition; Gas sensor; Hydrogen
E-Mail