| 학회 |
한국재료학회 |
| 학술대회 |
2014년 가을 (11/27 ~ 11/28, 대전컨벤션센터) |
| 권호 |
20권 2호 |
| 발표분야 |
A. 전자/반도체 재료(Electronic and Semiconductor Materials) |
| 제목 |
Stress Modulation and Ferroelectric Properties of Nano-grained PbTiO3 Thick Films on the Different Substrates Fabricated by Aerosol Deposition |
| 초록 |
Nano-grained PbTiO3 (PT) thick films were deposited on Si, yttria-stabilized zirconia (YSZ), and Ni substrates using an aerosol deposition (AD) method at room temperature. The AD PT thick films on each different substrate were annealed at 500°C and 700°C for 1 h to increase the crystallinity. The stresses in the PT film were modulated by controlling the difference in the coefficient of thermal expansion (CTE) between the films and substrates during the thermal annealing process. The morphology of the AD PT films was examined from the polycrystalline dense structure (thickness ~8 µm), and the changes in the crystallographic phase, in-plane stresses, and ferroelectric properties in annealed films were investigated. In-plane stress analysis showed that the PT films annealed at 500°C and 700°C on each substrate exhibited compressive stress. Owing to the effects of compressive stress in the PT film, the film showed less tetragonality (c/aratio) and enhanced ferroelectric behaviors. The change in the polarization-electric field(P-E) hysteresis loop of the PT films was explained by the stress induced from CTE mismatch between the films and substrates. |
| 저자 |
이정근1, 최민근1, 강수빈1, 임지호1, 김휘종1, 류정호2, 이종필3, 정대용1
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| 소속 |
1인하대, 2재료(연), 3명지대 |
| 키워드 |
PbTiO3; thick films; aerosol-deposition; ferroelectric; coefficient of thermal expansion; stress modulation
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| E-Mail |
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