| 학회 | 한국재료학회 |
| 학술대회 | 2004년 봄 (05/14 ~ 05/14, 강릉대학교) |
| 권호 | 10권 1호 |
| 발표분야 | Display |
| 제목 | Filtered vacuum arc법을 이용한 MgO 보호막 증착에 미치는 자장의 영향. |
| 초록 | Currently, there have been attempts to make a large area coating which is an important challenge of display device (PDP, LCD, etc.). In this study, a filtered vacuum arc system with four cathode targets is used to deposit MgO protective layer on large area (42 inch), which is the first trial for industrial applications. With variations of magnetic field, MgO thin films were deposited using Mg targets at O2 + Ar ambient. The effects of magnetic field on coating process and the variation of properties of MgO thin films were investigated. Behavior of extraction beams was found to be significantly changed according to the variations of magnetic field. The working temperatures and deposition rates were also affected. 3D profiler was used to measure the thickness of thin films. UV spectrophotometer was used to examine the optical transmittance of the MgO layer. Optical transmittance of MgO films was more than 80%, which is independent of the magnetic field. However, XRD patterns of MgO thin films were different each other, because deposition conditions have been dissimilar according as the behaviors of extraction beam caused by the variations of magnetic field. |
| 저자 | 이은성1, 김종국1, 배성규1, 이성훈1, 조영상2 |
| 소속 | 1한국기계(연), 2아텍시스템 |
| 키워드 | arc; MgO protective layer; magnetic field; large area coating |
