| 학회 |
한국재료학회 |
| 학술대회 |
2016년 봄 (05/18 ~ 05/20, 여수 디오션리조트 ) |
| 권호 |
22권 1호 |
| 발표분야 |
A. 전자/반도체 재료 분과 |
| 제목 |
Epitaxial Growth of Yttrium Iron Garnet (YIG) film on Gadolinium Gallium Garnet (GGG) Substrate using RF Sputtering |
| 초록 |
In this study, We report on epitaxial growth of yttrium iron garnet Y3Fe5O12 (YIG) thin film deposited on (111)-Gadolinium Gallium Garnet Gd3Ga5O12 (GGG) substrate by radio frequency (RF) sputtering method. The deposited YIG thin films are annealed in oxygen atmosphere at different temperatures to enhance the crystal structure. The surface roughness was studied by Atomic Force Microscopy (AFM). It revealed the root-mean-square roughness is varied between 0.2 to 0.3 nm. The high crystallinity and thickness of YIG thin film range between 10 and 150 nm were investigated by high resolution X-ray diffraction (HR-XRD) and X-ray Reflectivity (XRR) respectively. Transmission Electron Microscopy (TEM) was measured and accompanied with FFT patterns for t = 50 nm film to confirm the crystalline structure of YIG films. Magnetic properties of thin films were characterized by using Vibration Sample Magnetometer (VSM) and Ferromagnetic Resonance (FMR) measurements. The thickness dependence of linewidth of FMR spectra was also investigated at different thicknesses of YIG films. |
| 저자 |
Phuoc Cao Van, Jong-Ryul Jeong
|
| 소속 |
Chungnam National Univ. |
| 키워드 |
Magnetic Materials; FMR; Epitaxial Growth; RF sputtering
|
| E-Mail |
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