| 초록 |
The compressive stress in the films has been generally known to be responsible for surface wrinkling. Compressive stress can be induced by various means, such as mechanical, thermal, optical, or chemical stimuli. To explain these phenomena, there have been a number of researches on elucidating the mechanism. However, most of studies have been focused on wrinkles in bi-layer, not for multiple-stacked layers(＞tri-layers). Therefore, wrinkles that occur in multiple-stacked layers have been less investigated for their fabrication and mechanism analysis. In this study, we derive a relationship between physical properties of each constituting layer and the wavelength of wrinkled surface while considering the free energy minimization for the wrinkled system, which matches well the results from experimentally demonstrated multiple-layer-stacked films. In addition, the presented equation can be used as a metrology that can determine the unknown mechanical properties of ultra-thin layers. |
