| 학회 | 한국재료학회 |
| 학술대회 | 2015년 가을 (11/25 ~ 11/27, 부산 해운대그랜드호텔) |
| 권호 | 21권 2호 |
| 발표분야 | B. 나노화학/바이오 재료 |
| 제목 | Fabrication and Characterization of SnO2 Thin Film for Low ppm Range H2S Gas Sensing |
| 초록 | Semiconducting metal oxides gas sensors have many advantages such as good sensitivity, selectivity, speed and durability. Among these various sensing materials, SnO2 based gas sensors have drawn much attention because of their excellent mechanical stability, low manufacturing costs. In typical, the SnO2-based gas sensors have been fabricated with multi-stacks of thin films. The morphology of the SnO2 films was controlled by changing the spray parameter and the sensing parameter was primarily determined by the controlled film morphology. In this study, we will present that the SnO2-based gas sensors can have high sensitivity at low ppm range of H2S with optimized condition of SPD process. The optimization of SnO2 gas sensor was carried out a detailed analysis of the influence of deposition parameter on the structure of films deposited by spray pyrolysis. The films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM). Sheet resistance, the hall mobility and the carrier concentration were examined by Hall measurement. The gas sensing studies were carried out using a static gas chamber to sense H2S gas in air ambient. |
| 저자 | 강성웅1, 최요민2, 좌용호1, 엄누시아1 |
| 소속 | 1한양대, 2한국산업기술시험원 소재부품기술센터 |
| 키워드 | Gas sensing; Tin oxide; Hydrogen sulfide; Spray Pyrolysis Deposition |
