| 초록 |
Polybenzoxazole was synthesized by polymerizing various polyhydroxyamide precursors and it was confirmed that Pattern performed well using SEM which was confirmed to be synthesized using FT-IR and FT-NMR. PHA was synthesized using 0.2 eq of phthalic, Succinic anhydride, and maleic anhydride was synthesized at 0.1, 0.2, 0, 3 eq. All PHA synthesized was well dissolved in a flying solvent such as NMP, DMAc, DMSO. All synthesized PHAs were well dissolved in solvents such as NMP, DMAc, DMSO and others. The silicon wafer was fabricated at 3 cm x 3 cm and spin coated at 1000 rpm for 50 sec. Prebake was at 130 ~ 150 ℃ for 5 minutes. Aligner uses MIDAS's MDA-400S and give energy of 450 mJ using the 365 nm I-line wavelength. Develop was carried out using tetramethylammonium hydroxide aqueous solution 2.38%, and the development time was adjusted in order to form the best line. |
