| 초록 |
With the rapid developments in semiconductor technology, low-temperature co-fired ceramics (LTCC) have turned out to be very promising technology. The demands for compact electrical assemblies, smaller power loss as well as high signal density can be fulfilled by LTCC. Despite various advantages of LTCC, there are still remained problems during fabrication process. First of all, there are significant changes in the ceramic structure as shrinkage occurs in all dimensions during traditional free sintering. The second problem is the loss of geometric precision that leads to limit the ability to produce a large number of modules in single LTCC panel. In this work, zero shrinkage sintering technology is applied to the LTCC systems composed of Bi2O3-B2O3 based glass and conventional LTCC materials such as CaO-Al2O3-SiO2 based glass + alumina. IR characteristics and capacitance change as well as on the microstructure of the interfacial state are investigated with regard to the sintering temperature. |
