| 학회 |
한국고분자학회 |
| 학술대회 |
2016년 봄 (04/06 ~ 04/08, 대전컨벤션센터) |
| 권호 |
41권 1호 |
| 발표분야 |
기능성 고분자 |
| 제목 |
Formation of ultrathin Al2O3 / ZrO2 nanolaminate by atomic layer deposition for barrier property enhancement |
| 초록 |
For flexible display applications, barrier properties to water vapor and oxygen transport are highly required for plastic substrates. Al2O3 / ZrO2 nanolaminate exhibited excellent barrier properties than the single layer of Al2O3 or ZrO2 due to the defect filling mechanism by alternating the layer. However, tach time for nanolaminate formation is too long when combined with other processes in roll-to-roll process. Therefore, minimizing each layer thickness and number of layer is essential while maintaining the barrier properties. Layer growth mechanism and morphology of each layer were investigated for ultrathin nanloaminate process to be optimized by characterization with AFM, TEM, and contact angle measurement |
| 저자 |
은지혜1, 김현기2, 김성수1
|
| 소속 |
1경희대, 2Regional Innovation Center for Components and Materials for Information Display |
| 키워드 |
PEALD; nanolaminate; morphology; Al2O3; ZrO2
|
| E-Mail |
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