화학공학소재연구정보센터
학회 한국재료학회
학술대회 2003년 가을 (11/21 ~ 11/22, 연세대학교)
권호 9권 2호
발표분야 반도체
제목 Hot wall epitaxy에의해 성장된HgCdTe 에피레이어의 광전기적특성
초록 Hg1-xCdxTe (MCT) was grown by hot wall epitaxy. Prior to the MCT growth, the CdTe (111) buffer layer was grown on the GaAs substrate at the temperature of 590 °C for 15 min. When the thickness of the CdTe buffer layer was 5 µm or thicker, the full width at half maximum values obtained from the x-ray rocking curves were found to significantly decrease. After a good quality CdTe buffer layer was grown, the MCT epilayers were grown on the CdTe (111) /GaAs substrate at various temperatures in situ. The crystal quality for those epilayers was investigated by means of the x-ray rocking curves and the photocurrent experiment. The photoconductor characterization for the epilayers was also measured. The energy band gap of MCT was determined from the photocurrent measurement and the x composition rates from the temperature dependence of the energy band gap were turned out.
저자 홍광준
소속 조선대
키워드 Hg1-xCdxTe epilayer; hot wall epitaxy; x-ray rocking curves; photocurrent; photoconductor characterization
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